| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a liquid material applicator by which application time can be shortened. <P>SOLUTION: In a defect correcting apparatus, a mobile plate 42, which can move in a plane that is located between a substrate 5 and an observation lens barrel 31a and is in parallel to the substrate 5, is provided, and a plurality of objective lenses 2 and a plurality of application units 43 are provided at a lower surface of the mobile plate 42. When a defect on the surface of a substrate 5 is observed, the mobile plate 42 is moved so as to arrange the desired objective lens 2 under the observation lens barrel 31a. When correction ink 20 is applied onto the defect, the mobile plate 42 is moved so as to arrange a desired application units 43 under the observation lens barrel 31a. A plurality of application units respectively apply different color ink 20 so that washing of application needles 11 every time when color of ink 20 is changed is unnecessary, thereby shortening ink application time. <P>COPYRIGHT: (C)2009,JPO&INPIT |
