| 摘要 |
PROBLEM TO BE SOLVED: To secure the durability of a wiring part and not disturb the displacement of a piezoelectric element by preventing a wiring structure to a piezoelectric vibrator from harmfully influencing the liquid-tightness of a pump chamber in a piezoelectric pump including a shim formed of a conductive metal thin plate, a flat round shape piezoelectric vibrator including a piezoelectric element formed on at least one surface of front and back surfaces of the shin, and a driver circuit board formed by making an O-ring thereof contact with a surface including the piezoelectric element layer of the piezoelectric vibrator and supplying electricity to the pump chamber and the piezoelectric vibrator, and providing pumping action by vibrating the piezoelectric vibrator. SOLUTION: In the piezoelectric pump 20, the piezoelectric vibrator 10 and a driver circuit board are connected via a FPC substrate, and the FPC substrate includes an annular electrode conductive to a surface opposite to the shim of the piezoelectric element layer at the pump chamber side and at least partially overlapping with the O-ring in a plane view along the whole circumference. COPYRIGHT: (C)2009,JPO&INPIT
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