METHODS AND SYSTEMS FOR GAS SENSING

摘要

Methods and systems for gas sensing are disclosed. In one instance, the method for sensing the presence of a gas includes exposing at least a portion of one or more carbon films to the gas, the gas comprising polar molecules, the at least one carbon film being formed, on a silicon carbide substrate, by solid- state/ thermal decomposition of the silicon carbide substrate, and measuring a change in an electrical property of the one or more carbon films.