| 摘要 |
PROBLEM TO BE SOLVED: To provide a large-area surface inspection device, capable of inspecting the surface shape of a coating film formed on a large-area substrate of a flat display panel, in a short time and at low cost. SOLUTION: This surface inspection device of the coating film 14 formed on the substrate 13 has a point light source 20; a light intensity distribution adjustment filter 30, provided in the light passage of the light emitted from the point light source 20 and for adjusting the light intensity distribution of light from the point light source 20; a half mirror 21; a Fresnel lens 22 which converts the light passing through the half mirror 21 into parallel light and irradiates the light onto the surface of the coating film 14, and which is arranged so as to condense the reflected light from the surface of the coating film 14; and a CCD camera 26 which observes an optical image formed by condensing and imaging the reflected light condensed by the Fresnel lens 22 and is guided into a light passage which is different from the point light source 20 by the half mirror 21. COPYRIGHT: (C)2009,JPO&INPIT
|
