发明名称 |
Electrolytic processing apparatus and electrolytic processing method |
摘要 |
An electrolytic processing apparatus can increase the efficiency of the dissociation reaction of water and efficiently perform electrolytic processing, and can eliminate the need for an operation of a change of ion exchanger. The electrolytic processing apparatus includes: a processing electrode and a feeding electrode; a liquid supply section for supplying a liquid containing an ion-exchange material between the workpiece and at least one of the processing electrode and the feeding electrode; a power source for applying a voltage between the processing electrode and the feeding electrode; and a drive section for moving the workpiece and at least one of the processing electrode and the feeding electrode relative to each other; wherein electrolytic processing of the workpiece is carried out while keeping the workpiece not in contact with but close to the processing electrode at a distance of not more than 10 mum.
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申请公布号 |
US7527723(B2) |
申请公布日期 |
2009.05.05 |
申请号 |
US20050035373 |
申请日期 |
2005.01.14 |
申请人 |
EBARA CORPORATION |
发明人 |
KOBATA ITSUKI;WADA YUTAKA;HIYAMA HIROKUNI;SAITO TAKAYUKI;TOMA YASUSHI;SUZUKI TSUKURU;KODERA AKIRA |
分类号 |
B23H7/36;B23H1/10;B23H3/10;B23H5/08;B24B37/04;C25F1/00;C25F3/00;H01L21/321;H01L21/768 |
主分类号 |
B23H7/36 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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