发明名称 Temperature adaptive optical modulator
摘要 The present invention relates to a spatial optical modulator, more specifically to a temperature adaptive optical modulator. The spatial optical modulator according to an aspect of the present invention includes a substrate, an upper part of the substrate being doped; a structure layer, a center part of the structure layer being located at a predetermined distance from the substrate; driving means, located on the structure layer and allowing the center part of the structure layer to move upwardly and downwardly; an upper reflection layer, located in an upper part of the center part of the structure layer and reflecting and diffracting an incident beam of light; and a lower reflection layer, located on the substrate and reflecting and diffracting the incident beam of light by a stepped portion formed between the upper reflection layer and the lower reflection layer, below the structure layer. With the present invention, the spatial optical modulator can be efficiently operated regardless of the surrounding temperature.
申请公布号 US7529018(B2) 申请公布日期 2009.05.05
申请号 US20070864474 申请日期 2007.09.28
申请人 SAMSUNG ELECTRO-MECHANICS CO., LTD. 发明人 YANG JEONG-SUONG
分类号 G02B26/00;G02F1/00 主分类号 G02B26/00
代理机构 代理人
主权项
地址