发明名称 |
Optical characteristic measuring apparatus and measuring method using light reflected from object to be measured |
摘要 |
A measurement-purpose light source generates a measurement light used for measuring an optical characteristic of an object to be measured, and the measurement light includes a component in a wavelength range for measurement of the optical characteristic of the object. An observation-purpose light source generates an observation light used for focusing on the object to be measured and checking a position of measurement. The observation light is selected such that the observation light includes a component that can be reflected from the object to be measured. The measurement light and the observation light are thus applied independently to the object to be measured, through a common objective lens, and accordingly improvement of the precision in measurement of the optical characteristic and facilitation of focusing on the object to be measured are achieved simultaneously.
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申请公布号 |
US7528967(B2) |
申请公布日期 |
2009.05.05 |
申请号 |
US20080121287 |
申请日期 |
2008.05.15 |
申请人 |
OTSUKA ELECTRONICS CO., LTD. |
发明人 |
OKAWAUCHI MAKOTO;MIZUGUCHI TSUTOMU;KAWAGUCHI SHIRO |
分类号 |
G01J3/00;G01N21/55 |
主分类号 |
G01J3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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