发明名称 Energy dispersion type radiation detecting system and method of measuring content of object element
摘要 To provide an energy dispersion type radiation detecting system and a method of measuring a content of an object element capable of carrying out a measurement by determining an intensity of an incidence radiation to constitute an optimum minimum limit of detection by restraining an influence of a pile up, the energy dispersion type radiation detecting system includes an incidence system of irradiating the incidence radiation to a sample by a predetermined intensity, a detection system of detecting a radiation emitted from the sample by irradiating the incidence radiation for specifying a content of an object element of the sample based on a spectrum of the detected radiation, and the energy dispersion type radiation detecting system includes a control portion capable of irradiating the incidence radiation by an optimum intensity by determining the optimum intensity of the incidence radiation minimizing a minimum limit of detection of the object element based on the spectrum of the detected radiation.
申请公布号 US7529337(B2) 申请公布日期 2009.05.05
申请号 US20070820893 申请日期 2007.06.21
申请人 SII NANO TECHNOLOGY INC. 发明人 MATOBA YOSHIKI;HASEGAWA KIYOSHI;FUKAI TAKAYUKI
分类号 G01N23/223 主分类号 G01N23/223
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