| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a chemical leakage sensing device capable of sensing chemical leakage with use of a flowmeter not only at a stand-by stage but also in process of a step. <P>SOLUTION: The chemical leakage sensing device includes: a sensing section for measuring the flow rate of a chemical that is supplied into a step chamber; a step control section for determining the presence of chemical leakage in accordance with the flow rate thus measured, and for generating a control signal; and a facility control section for controlling operation of a facility upon receiving the control signal. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
