OSCILLATOR AND OSCILLATOR HAVING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide an oscillator and an oscillator having the oscillation element of high performance, which can be driven at a low voltage. SOLUTION: The oscillator includes: a vibrator 32 having a vibration piece 36 which is formed so as to be extended in an X direction and vibrates in a Y direction perpendicular to the X direction and vibrator islands 34a and 34b for supporting both ends of the vibration piece 36; and electrode parts 33a and 33b which are disposed so that the vibration piece 36 is sandwiched between them with a prescribed distance from the vibration piece 36 and generates electrostatic force when a voltage is applied to vibrate the vibration piece 36. The vibration piece 36 is integrally formed with a vibration part 39 and base ends 35a and 35b for linking the vibration part 39 to the vibration piece islands 34a and 34b. The width of the vibration part 39 is formed wider than widths of the base ends 35a and 35b. COPYRIGHT: (C)2009,JPO&INPIT