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发明名称
摘要
申请公布号	JP4260161(B2)	申请公布日期	2009.04.30
申请号	JP20050352407	申请日期	2005.12.06
申请人		发明人
分类号	G06F17/50;H01L21/82;H01L21/822;H01L27/04;H01L29/00	主分类号	G06F17/50
代理机构		代理人
主权项
地址

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