| 摘要 |
An apparatus for reversing a substrate is provided to improve driving speeds of a reverse unit and an elevating unit, thereby improving process efficiency. An apparatus(10) for reversing a substrate comprises a holding unit(100), a reverse unit(200) and an elevating unit(300). The holding unit holds an edge of the substrate. The reverse unit has the first driving motor. The first driving motor delivers torque to the holding unit. The first driving motor inverts the substrate through the holding unit. The elevating unit has the second driving motor. The second driver motor delivers a driving force to the reverse unit in order to move the reverse unit upward or downward.
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