SEMICONDUCTOR PRODUCTION DEVICE AND METHOD FOR PROCESSING LOADING AND UNLOADING WAFER BY SETTING VARIABLE SLOT THEREFOR

摘要

A semiconductor manufacturing device for loading/unloading a wafer by a variable setting of a wafer slot and a method thereof are provided to prevent an error generation of a wafer due to falling of particles by randomly setting a wafer. A wafer slot selection mode is set in advance. When the wafer slot selection mode is set to a random mode, a wafer is loaded by a preset slot selection sequence(308). When a loading of the wafer is completed, a loaded wafer is transferred to a process device and a run process is carried out(309). The wafer of the result is unloaded by the preset slot selection sequence(310). A screen for setting the wafer slot selection mode is displayed by carrying out a wafer slot selection setting program.