发明名称 Assembly
摘要 An assembly includes a first element having a predetermined functionality that is to be positioned with respect to a second element. The elements are arranged in a spaced relationship on a support frame. The support frame is provided with an interface surface formed on or in the support frame for receiving the first element. The interface surface determines the position of the first element with respect to the second element, and is configured in accordance with the predetermined functionality so that the first element is positionable with respect to the second element with at least three degrees of freedom.
申请公布号 US7525637(B2) 申请公布日期 2009.04.28
申请号 US20080073127 申请日期 2008.02.29
申请人 ASML NETHERLANDS B.V. 发明人 FRANKEN DOMINICUS JACOBUS PETRUS ADRIANUS
分类号 G03B27/42;G02B7/02;G02B26/08;G03B27/54;G03F7/20;H01L21/027 主分类号 G03B27/42
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