发明名称 Method and apparatus for forming an electrical connection to a semiconductor substrate
摘要 A device (100) may use one or more conductive elements (112) to electrically couple a substrate (116) and a cap (114). In one embodiment, an acceleration sense element may be formed on the substrate (116), and the cap (114) may be used to provide hermetic protection to the acceleration sense element. In one embodiment, conductive elements (112) may be formed by dispensing conductive die attach material. Wire bonds (e.g. 322) bonded to bond pads (e.g. 332) on the substrate (e.g. 316) may be used to couple substrate (116), the conductive element pad (335), and the cap (114), to a desired predetermined potential.
申请公布号 US7524693(B2) 申请公布日期 2009.04.28
申请号 US20060383659 申请日期 2006.05.16
申请人 FREESCALE SEMICONDUCTOR, INC. 发明人 SCHULTZ PETER S.
分类号 H01L21/00;H01L21/44;H01L21/48;H01L21/50;H01L29/82;H01L29/84 主分类号 H01L21/00
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