METHODS FOR FABRICATION OF POSITIONAL AND COMPOSITIONALLY CONTROLLED NANOSTRUCTURES ON SUBSTRATE

摘要

Fabrication methods disclosed herein provide for a nanoscale structure or a pattern comprising a plurality of nanostructures of specific predetermined position, shape and composition, including nanostructure arrays having large area at high throughput necessary for industrial production. The resultant nanostracture patterns are useful for nanostructure arrays, specifically sensor and catalytic arrays.