| 发明名称 |
METHOD AND DEVICE FOR DEPOSITING FILM ON BASE MATERIAL |
| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for depositing a film having satisfactory adhesion. SOLUTION: The method in this invention comprises: a deposition step for the film by arc evaporation; and a deposition step for the film by dual magnetron sputtering, and the deposition is performed in succession or simultaneously. COPYRIGHT: (C)2009,JPO&INPIT |
| 申请公布号 |
JP2009068110(A) |
申请公布日期 |
2009.04.02 |
| 申请号 |
JP20080235172 |
申请日期 |
2008.09.12 |
| 申请人 |
SANDVIK INTELLECTUAL PROPERTY AB |
发明人 |
RODMAR MARKUS;SELINDER TORBJOERN |
| 分类号 |
C23C14/22;B23B27/14;C23C14/02;C23C14/24;C23C14/34;C23C14/35;C23C14/48 |
主分类号 |
C23C14/22 |
| 代理机构 |
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