摘要 |
<P>PROBLEM TO BE SOLVED: To provide a compensated gray scale mask for solving problems of channel attack and drain neck attack in conventional techniques. <P>SOLUTION: The compensated gray scale mask comprises a U-shaped source electrode mask region, a drain electrode mask region with a rectangular end placed in the source electrode mask region, a U-shaped light-blocking bar arranged between the source electrode mask region and the drain electrode mask region, and slits formed between the source electrode mask region and the light-blocking bar and between the light-blocking bar and the drain electrode mask region respectively. A channel attack defect in conventional techniques can be effectively compensated by disposing a compensation region inside the end of the source electrode mask region. <P>COPYRIGHT: (C)2009,JPO&INPIT |