发明名称 COMPENSATED GRAY SCALE MASK
摘要 <P>PROBLEM TO BE SOLVED: To provide a compensated gray scale mask for solving problems of channel attack and drain neck attack in conventional techniques. <P>SOLUTION: The compensated gray scale mask comprises a U-shaped source electrode mask region, a drain electrode mask region with a rectangular end placed in the source electrode mask region, a U-shaped light-blocking bar arranged between the source electrode mask region and the drain electrode mask region, and slits formed between the source electrode mask region and the light-blocking bar and between the light-blocking bar and the drain electrode mask region respectively. A channel attack defect in conventional techniques can be effectively compensated by disposing a compensation region inside the end of the source electrode mask region. <P>COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009069805(A) 申请公布日期 2009.04.02
申请号 JP20080141725 申请日期 2008.05.29
申请人 BEIJING BOE OPTOELECTRONICS TECHNOLOGY CO LTD 发明人 LV JING;CHOI SEUNGJIN
分类号 G03F1/00;G03F1/68;H01L21/336;H01L29/786 主分类号 G03F1/00
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