CRYOGENIC FLUID RECOVERY APPARATUS FOR THERMAL VACUUM CHAMBER

摘要

A cryogenic fluid collecting device for a vacuum heat chamber is provided to reduce a cost as the used LN2 is reused not drained out and to collect the LN2 by the simple structural change. A cryogenic fluid collecting device(100) for a vacuum heat chamber: a shroud(110) making a cryogenic space by injecting LN2; an LN2 storage tank(130) collecting the LN2 from the shroud and re-supply to the shroud; an LN2 pump(150) positioned between the LN2 storage tank and the shroud, giving pressure the LN2 in order to be transported; and a four direction valve(170) changing a flow channel in order to collect the LN2 in the between of the shroud and the LN2 tank.