| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an inertial force sensor with improved detection accuracy. <P>SOLUTION: The inertial force sensor is provided with a detection element 1 having an acceleration detecting section and an angular speed detecting section. The detection element 1 has two orthogonal arms, as first and second arms 8, 10 which are coupled in a substantially orthogonal direction; one end of two first arms 8 is supported by a support section 12; the other end of two first arms 8 is coupled to a first fixing section 4; a spindle 3 is coupled to a tip of the second arm 10; the first fixing section 4 is coupled to a second fixing section 6 by a fixing arm 7; the first arm 8 is disposed in the X-axis direction; a first elastic section 9 is provided in the first fixing section 4 so as to be deformed elastically only in the X-axis direction; the fixing arm, as a second coupling section, is disposed in the Y-axis direction; and a second elastic section 11 is provided in the second fixing section 6 that elastically deforms only in the Y-axis direction. <P>COPYRIGHT: (C)2009,JPO&INPIT |
