发明名称 SIMULTANEOUS WAFER ID READING
摘要 <p>The present invention discloses apparatuses and methods for simultaneous viewing and reading top and bottom images from a workpiece. The present ID reader can comprise an enclosure covering a top and bottom section of the workpiece with optical elements to guide the light from the workpiece images to a camera. The optical element can be disposed to receive images from a high angle with respect to the surface of the workpiece. The present ID reader can further comprise a light source assembly to illuminate the image. The light source assembly can utilize a coaxial light path with the images, preferably for bright field illumination. The light source assembly can also utilize a non-coaxial light path, preferably for dark field illumination. In an embodiment, the simultaneous images reaching the camera are separate into two distinct images on two different sections of the camera. In another embodiment, the simultaneous images reaching the camera are superimposed into one image on the camera.</p>
申请公布号 WO2009037674(A1) 申请公布日期 2009.03.26
申请号 WO2008IB53826 申请日期 2008.09.22
申请人 DYNAMIC MICRO SYSTEMS;BARKER, DAVID 发明人 BARKER, DAVID
分类号 H01L21/00;G06K7/10;G06K9/20 主分类号 H01L21/00
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