发明名称 MAGNET ASSEMBLY CAPABLE OF GENERATING MAGNETIC FIELD HAVING DIRECTION THAT IS UNIFORM AND CAN BE CHANGED AND SPUTTERING APPARATUS USING THE SAME
摘要 The magnet assembly includes one rotatable dipole magnet subassembly, which is formed from a permanent magnet and a magnetically permeable convex end portion coupled to each of both ends of the permanent magnet, and at least two magnetically permeable flux guide subassemblies, which are configured so as to be magnetically coupled to the dipole magnet subassembly. The flux guide subassembly has a concave end portion that fits into the convex end portion. The flux guide assemblies guide a flux from the dipole magnet subassembly and generate a flux outside. The condition of fitting into the flux guide subassemblies is reversed by rotating the dipole magnet subassembly, whereby it is possible to easily reverse the direction of a magnetic field generated outside.
申请公布号 US2009078571(A1) 申请公布日期 2009.03.26
申请号 US20080145456 申请日期 2008.06.24
申请人 CANON ANELVA CORPORATION 发明人 ABARRA EINSTEIN NOEL;ENDO TETSUYA
分类号 H01F7/02;C23C14/35 主分类号 H01F7/02
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