| 发明名称 |
SERVO SYSTEM FOR A TWO-DIMENSIONAL MICRO-ELECTROMECHANICAL SYSTEM (MEMS)-BASED SCANNER AND METHOD THEREFOR |
| 摘要 |
A servo control system micro- electromechanical systems (MEMS)-based motion control system (and method therefor), includes a motion generator having an inherent stiffness component.
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| 申请公布号 |
KR20090029853(A) |
申请公布日期 |
2009.03.23 |
| 申请号 |
KR20097003853 |
申请日期 |
2004.04.09 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
SRI M. SRI JAYANTHA;DANG HIEN;SHARMA ARUN;ELEFTHERIOU EVANGELOS S.;LANTZ MARK A.;POZIDIS CHARALAMPOS |
| 分类号 |
G11B9/14;G05B19/18;G11B;G11B7/085;G11B7/09 |
主分类号 |
G11B9/14 |
| 代理机构 |
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代理人 |
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