发明名称 EXHAUST MEMBER FOR SEMICONDUCTOR SINGLE CRYSTAL PRODUCTION
摘要 <p>Even when the flow of a dopant, a dopant oxide, an amorphous material in a furnace into an exhaust pipe is continued for a long period of time, the suppression of unfavorable phenomena of the fixation of them onto the internal surface of an exhaust member and the formation of an amorphous layer can avoid cleaning work, which requires a large man-hour, and can finish the cleaning work simply in a short time. When the surface, to be treated, of an exhaust member such as an exhaust pipe is formed of an iron and steel material, the surface to be treated is plated with chromium having a higher chemical activity than iron. Alternatively, when the surface to be treated in an exhaust member such as an exhaust pipe is formed of an iron and steel material, the surface to be treated is plated with fluororesin-added electroless nickel.</p>
申请公布号 WO2009031408(A1) 申请公布日期 2009.03.12
申请号 WO2008JP64835 申请日期 2008.08.20
申请人 SUMCO TECHXIV CORPORATION;SUDA, AYUMI;TOMONAGA, TSUNEAKI 发明人 SUDA, AYUMI;TOMONAGA, TSUNEAKI
分类号 C30B29/06;C23C18/52;C25D5/26;C30B15/00 主分类号 C30B29/06
代理机构 代理人
主权项
地址