| 摘要 |
PROBLEM TO BE SOLVED: To provide the collection apparatus of solid matter suited to simple and safe treatment of dry etching exhaust gas containing solid matter, and the collection method of the solid matter using the same. SOLUTION: There are provided the collection apparatus of the solid matter of dry etching exhaust gas containing solid matter having a filter and a cooler, and the collection method of solid matter using the same. COPYRIGHT: (C)2009,JPO&INPIT
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