发明名称 Measuring distance using gas gauge proximity sensor
摘要 In a gas gauge, effects due to changes in the local environment are reduced by causing a measurement nozzle and a reference nozzle to react as if they were co-located, or located at approximately the same position. This is achieved by venting the reference nozzle in very close proximity to the measurement nozzle. A reference chamber surrounding the reference plate and reference nozzle is vented at approximately the same location as the measurement nozzle. In an embodiment for use in a vacuum environment, the measurement nozzle is surrounded with an annular ring. The measurement annular ring is connected to an annular ring around the reference nozzle, which acts to co-locate the reference nozzle and the measurement nozzle. To avoid choked flow, another annular ring or rings may be placed around the measurement annular ring.
申请公布号 US7500380(B2) 申请公布日期 2009.03.10
申请号 US20060396908 申请日期 2006.04.04
申请人 ASML HOLDING N.V. 发明人 CARTER FREDERICK MICHAEL;KOCHERSPERGER PETER
分类号 G01B13/08;G01B13/12;G01L7/00;G01L19/02;G01L19/04 主分类号 G01B13/08
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