| 摘要 |
With respect to each of a plurality of shots on a substrate, a line or surface is calculated which approximates a plurality of positions of the surface of the substrate detected by a detector with respect to a plurality of places, and the difference between the position of the surface detected by the detector and the position of the line or surface in the direction of the optical axis of a projection optical system is calculated with respect to each of the plurality of places. With respect to each of the plurality of places, the differences are averaged over the plurality of shots to determine an offset value.
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