| 摘要 |
A valve at the manufacturing apparatus for a semiconductor is provided to prevent the operation failure of the bellows due to the powder generation and extend the lifetime of the bellows. A valve at the manufacturing apparatus for a semiconductor comprises a main body(14) in which the first inlet(12) connected with a processing chamber and the second inlet port(13) connected to a vacuum pump is respectively formed; a opening/closing plate(17) which rectilinearly moves by a driving shaft(16) of an actuator(15) and opens and closes the first inlet; a bellows(18) which is fixed to the floor side of the opening/closing plate and opens and closes the first inlet by the opening/closing plate; a cartridge(21) installed at the inner part of the main body.
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