| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for producing a zinc oxide thin film having high orientation using an application process suitable for mass production and also free from problems on safety in a production process. SOLUTION: A metal oxide layer to be formed into a crystal nucleus is preformed on a substrate (first step), and thereafter, a zinc oxide precursor solution is applied thereto, and thermolysis is performed at≤200°C (second step), thus a transparent zinc oxide thin film having c-axis orientation can be easily formed on the crystal nucleus inexpensively. The substance composing the nucleus formed in the first step is an oxide containing at least one or more kinds selected from among Ti, Zn, In and Sn. COPYRIGHT: (C)2009,JPO&INPIT
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