| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of continuously measuring the minute abrasion amount of a driving part. SOLUTION: A thrust plate 16 to be intended to be measured, of two thrust plates 16 and 17 that form the driving part and move mutually relatively, is activated. A detector 20 arranged so that it can detect radiation from the direction V where variation over time of the average position of the activated thrust plate 16 is small detects the radiation emitted from the activated thrust plate 16 for a predetermined time while the driving part is driven, thereby measuring the abrasion amount of the driving part. Thus, by detecting the radiation for the predetermined time while driving the driving part, error due to the variation of the detected value by the variation over time of the average position of the activated thrust plate 16 and the detector 20 is suppressed, and the minute abrasion amount of the driving part can be continuously measured. COPYRIGHT: (C)2009,JPO&INPIT
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