| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve detection sensitivity and direction dependency of linearity of an output. <P>SOLUTION: A sensor body 1 has a first piezo film 102 arranged on a horizontal surface, and having a first electrode 101 on the upper surface and the second electrode 103 on the under surface; a second piezo film 108 arranged on a horizontal surface separated downward from the first piezo film 102 and having a third electrode 107 on the upper surface and a fourth electrode 109 on the under surface; and a rigid body 105 displaceable in the horizontal direction and in the vertical direction, arranged between the first piezo film 102 and the second piezo film 108. The sensor body 1 also has a structure symmetrical with respect to the horizontal direction and the vertical direction. <P>COPYRIGHT: (C)2009,JPO&INPIT |
