IMMERSION FLOW FIELD MAINTENANCE SYSTEM FOR IMMERSION LITHOGRAPHY MACHINE,申请号EP20060840637-传众专利搜索

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发明名称	IMMERSION FLOW FIELD MAINTENANCE SYSTEM FOR IMMERSION LITHOGRAPHY MACHINE
摘要
申请公布号	EP2027509(A1)	申请公布日期	2009.02.25
申请号	EP20060840637	申请日期	2006.12.25
申请人	SHANGHAI MICRO ELECTRONICS EQUIPMENT CO., LTD.	发明人	YANG, ZHIYONG
分类号	G03F7/20;H01L21/027	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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