| 摘要 |
An apparatus for synthesizing carbon nano-tube is provided to improve carbon nano-tube synthesis yield by suppressing ion damage with a mesh network removing ion or electron inside of a reaction chamber. In an apparatus for synthesizing carbon nano-tube, a reaction chamber(100) receives a substrate(130) coated with the catalyst(140). The plasma generation part(160) generates the plasma inside of the reaction chamber. A mesh network(170) is formed on the substrate and is earthed by as much as the area covering the whole substrate. The carbon nano-tube supplies a reaction gas to the reaction chamber and is mixed with catalyst coated onto the substrate.
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