SCRIBE APPARATUS AND METHOD THEREOF OF CUTTING OBJECT BY SUSTENANCE CONTACTLESS FLATNESS

摘要

A scribing head apparatus having a function of maintaining a flatness of an object to be cut in a non-contact manner and a scribing method using the same are disclosed. The scribing head apparatus, adapted to sequentially cut both surfaces of the object while moving in X-axis and Y- axis directions, includes first and second head drive modules provided above and below the object to be cut, respectively, and adapted to be moved toward the object so as to perform a cutting operation on the object while coming into contact with the object, and first and second flatness maintaining modules provided at opposite sides of the respective first and second head drive modules and serving to maintain a flatness of a cutting section of the object via air floating of the object. This configuration eliminates a response speed problem that may occur in a feedback control system, thereby achieving an improvement in management of the overall scribing apparatus and an enhancement in production yield by virtue of reduced defective products.