SPATIAL FREQUENCY WAVEFRONT SENSOR SYSTEM AND METHOD

摘要

Devices systems, and methods can characterize an optical surface of an object. A wavefront sensor system focuses light energy propagating from the object to form a pattern on a detector. The system maps the pattern to an array with a transform function such as a Fourier transform. The values of array correspond to characteristic locations and signals in a transform space, for example an intensity of spatial frequency signals in frequency space. The characteristic location and intensity of these signals in transform space are used to measure the optical surface. For example, a characteristic frequency of a spatial frequency intensity peak in Fourier transform space can be used to estimate the location of spots on the detector. Alternatively, the characteristics can be used to the measure sphere, cylinder and axis of a wavefront, wavefront elevation maps and point spread functions, often without locating positions of individual spots on the detector.