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发明名称
PRODUCING SOI STRUCTURE USING HIGH-PURITY ION SHOWER
摘要
申请公布号
EP2022088(A2)
申请公布日期
2009.02.11
申请号
EP20070795412
申请日期
2007.05.24
申请人
CORNING INCORPORATED
发明人
CITES, JEFFREY, S.;GADKAREE, KISHOR, P.;MASCHMEYER, RICHARD, O.
分类号
H01L21/762;B01D59/48;H01J37/08;H01L21/265;H01L27/12
主分类号
H01L21/762
代理机构
代理人
主权项
地址
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