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发明名称
Broken die detect sensor
摘要
A broken trim die tool detection sensor. The lands of the tie bar die connect with the leads of the unit to form switches. The states of these switches indicate broken die lands or other malfunctions.
申请公布号
US7488636(B2)
申请公布日期
2009.02.10
申请号
US20050254131
申请日期
2005.10.20
申请人
发明人
分类号
H01L21/8238;H01L21/48;H01L23/544
主分类号
H01L21/8238
代理机构
代理人
主权项
地址
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