| 摘要 |
An evaporator cell (100) which is equipped for evaporating, in particular, a high-melting evaporation material, comprises a crucible (10) for receiving the evaporation material, which crucible comprises a crucible base (11), a side wall (12) which extends in an axial direction of the crucible (10) and a crucible opening (13), and a heating device (20) having a heating resistor (21) which comprises a multiplicity of heating zones (21.1, 21.2) which are arranged on an outside of the crucible (10) and extend along the axial direction of the crucible (10), wherein the heating zones (21.1, 21.2) are equipped for multi-side resistance heating and/or electron beam heating of the crucible (10), and wherein the heating zones (21.1, 21.2) are constructed in such a manner that a heating current through the heating resistor (21) which is formed, for example by a resistance sleeve, flows in parallel and in the same sense through all heating zones (21.1, 21.2). A process for operation of the evaporator cell is also described.
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