| 摘要 |
An atomic force microscope apparatus scans a sample disposed in an X-Y plane, the sample having a surface, the surface having features in a Z direction perpendicular to the X-Y plane. The apparatus comprises an elongated arm having a pivot point and being rotatable about the pivot point in the X-Y plane; and a probe tip substructure that includes (i) a probe tip and (ii) a tip actuator. The probe tip substructure is disposed on the elongated arm a predetermined distance from the pivot point, wherein the arm disposes the probe tip at a location extended outward from the remainder of the AFM apparatus. The atomic force microscope apparatus moves the probe tip (i) by rotating the elongated arm about the pivot point, and (ii) by moving the tip actuator.
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