GROUND STRUCTURE, AND UNIT FOR SUPPORTING SUBSTRATE AND APPARATUS FOR FORMING THIN FILM HAVING THE SAME

摘要

A structure of a ground capable of electrically connecting a ground terminal to a ground main body is provided to prevent a connection part from bending in an arch shape and damage of a ground terminal. A structure of a ground capable of electrically connecting a ground terminal to a ground main body comprises the following units. A ground terminal(16) is inserted from a first inlet to a second inlet of a ground main body(10). A ground connection unit(20) is inserted from the second inlet to the first inlet of the ground main body. A through-hole(12) is formed in the ground main body. The through-hole is composed of a first opening, and a second opening formed in an opposite side of the first opening.