METHOD OF FABRICATING MULTI FUNCTION MICRO ELECTRO MECHANICAL SYSTEM SENSOR,申请号KR20070084718-传众专利搜索

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发明名称	METHOD OF FABRICATING MULTI FUNCTION MICRO ELECTRO MECHANICAL SYSTEM SENSOR
摘要
申请公布号	KR100880044(B1)	申请公布日期	2009.01.22
申请号	KR20070084718	申请日期	2007.08.23
申请人		发明人
分类号	H01L29/00;B81B7/00	主分类号	H01L29/00
代理机构		代理人
主权项
地址

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