| 摘要 |
The disclosed embodiments combine an electrothermal actuator system with an electrostatic attraction system, in order to orient bistable micromirrors in digital micromirror devices (DMDs). The micromirror, pivotally supported, can switch between two orientations. While typical DMD systems use electrostatic electrodes to orient the micromirror, stiction forces can restrict micromirror motion, affecting optical performance. The disclosed embodiments use an electrothermal actuation system to mechanically assist the electrodes, overcoming stiction without the need for a high-voltage reset pulse.
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