| 摘要 |
PROBLEM TO BE SOLVED: To provide a device for sticking a sheet and a sticking method preventing the cutting of a release sheet while preventing a spacer from peeling from the release sheet when an adhesive sheet temporarily attached to the band-shaped release sheet is stuck on an adherend by using a peeling plate. SOLUTION: The device 10 for sticking the sheet has a sticking unit 20 with first and second delivery means 12 and 13 imparting a delivery force to a raw fabric R, the peeling plate 15 for peeling the adhesive sheet S from the peeling sheet RL and a press roller 17 sticking the adhesive sheet S by pressing it against a ring frame RF and an adherent such as a wafer W and a supporting means 21 supporting the adherend. When the adhesive sheet S is positioned, a sticking front-end region SE is formed on the adhesive sheet S by retracting the peeling plate 15 to an intermediate stopping place through a direct-acting motor 16. A holding between the press roller 17 and the ring frame RF of the sticking front-end region SE is detected, and the peeling plate 15 is fitted so as to be retracted up to a shunting place in this case. COPYRIGHT: (C)2009,JPO&INPIT |
