| 摘要 |
PROBLEM TO BE SOLVED: To provide a planar type actuator capable of detecting the position of the moveable part by correctly measuring the shearing stress of a torsion bar without interfering the motion of the torsion bar. SOLUTION: The planar type actuator comprises the frame like fixing part 2; the movable part 3 supported rotatably via the torsion bar 4 arranged inside the fixing part 2; the driving means for driving the movable part 3; piezo resistance elements 7 equipped with two pairs of electrodes 8 and arranged on the torsion bar 4 orthogonally to each other and facing each other; and the wiring parts 10 formed on the torsion bar 4 and for wiring to the electrodes formed on the fixing part 2. COPYRIGHT: (C)2009,JPO&INPIT
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