发明名称 |
NONVOLATILE SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR FABRICATING THE SAME |
摘要 |
A nonvolatile semiconductor memory device includes bit line diffusion layers extending along the X direction in an upper portion of a semiconductor substrate; and gate structures extending along the Y direction on the semiconductor substrate and each including a charge trapping film and a gate electrode. The nonvolatile semiconductor memory device further includes a first interlayer insulating film in which first contacts respectively connected to the bit line diffusion layers are formed; and second contacts that penetrate through a UV blocking film and a second interlayer insulating film formed on the first interlayer insulating film and have bottom faces respectively in contact with the first contacts and top faces respectively in contact with metal interconnections.
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申请公布号 |
US2009014779(A1) |
申请公布日期 |
2009.01.15 |
申请号 |
US20080166069 |
申请日期 |
2008.07.01 |
申请人 |
KAWASHIMA KOICHI;TAKAHASHI KEITA |
发明人 |
KAWASHIMA KOICHI;TAKAHASHI KEITA |
分类号 |
H01L27/115;H01L21/8247 |
主分类号 |
H01L27/115 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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