IC-COMPATIBLE PARYLENE MEMS TECHNOLOGY AND ITS APPLICATION IN INTEGRATED SENSORS,申请号EP20000913858-传众专利搜索

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发明名称	IC-COMPATIBLE PARYLENE MEMS TECHNOLOGY AND ITS APPLICATION IN INTEGRATED SENSORS
摘要
申请公布号	EP1186002(A4)	申请公布日期	2009.01.14
申请号	EP20000913858	申请日期	2000.03.10
申请人	CALIFORNIA INSTITUTE OF TECHNOLOGY	发明人	JIANG, FUKANG;HAN, ZHIGANG;WANG, XUAN-QI;TAI, YU-CHONG
分类号	B81C1/00;B81B3/00;B81B7/02;H01L21/00;H01L21/302;H01L21/3065;H01L29/84;(IPC1-7):H01L21/00	主分类号	B81C1/00
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