| 摘要 |
A coordinate measuring machine (1) with vibration decoupling is disclosed, and a method for vibration damping or decoupling is realized. There is provided a measurement table (20) movable in the X-coordinate direction and in the Y-coordinate direction, which is essentially movable in one plane (25a). A controller (16) is connected to the vibration dampers (26) and the measurement table (20), wherein the controller (16) determines the influence of the measurement table (20) on the vertical position alterations of the coordinate measuring machine (1) from an impending or predetermined movement path (30) of the measurement table (20) and controls the vibration dampers (26) such that the position alterations caused by the influence of the measurement table (20) are compensated.
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