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经营范围
发明名称
THIN FILM FORMING METHOD
摘要
申请公布号
JPS52123871(A)
申请公布日期
1977.10.18
申请号
JP19760040270
申请日期
1976.04.12
申请人
HITACHI LTD
发明人
NOZAWA HARUO;HONMA YOSHIO;HARADA TADAYOSHI
分类号
H01L21/28;H01L21/302;H01L21/3065
主分类号
H01L21/28
代理机构
代理人
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地址
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