| 摘要 |
PURPOSE:To enable to fix a ceramic ring while avoiding damage and the like of the ceramic ring, by furnishing a metallic ring of a nonmagnetic metal at the outer peripheral surface of the ceramic ring which is installed to a cylindrical electrode, covering the outer peripheral surface of the metallic ring with a mesh electrode holder, and welding to fix them. CONSTITUTION:At the outer peripheral surface of a ceramic ring 4 which is fixed to a cylindrical electrode 1, a metallic ring 7 made of a nonmagnetic metal such as a stainless metal is installed and fixed. The outer peripheral surface of the metallic ring 7 is covered with a mesh electrode holder 5, the side of which is fixed by resistant-welding or laser welding at its plural portions adequately shown as B in the figure. In this case, the shrinkage fit can be applied to fix the metallic ring 7 to the ceramic ring 4.
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