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发明名称
DENSE FLUID PHOTOCHEMICAL PROCESS FOR SUBSTRATE TREATMENT
摘要
申请公布号
EP0391035(A3)
申请公布日期
1991.07.31
申请号
EP19900102501
申请日期
1990.02.08
申请人
HUGHES AIRCRAFT COMPANY
发明人
JACKSON, DAVID P.
分类号
C02F1/32;B08B3/12;B08B7/00;B08B7/04;C02F11/08;C23G5/00;H01L21/00;H01L21/304;H01L21/308;H05K3/26;(IPC1-7):C23G5/00
主分类号
C02F1/32
代理机构
代理人
主权项
地址
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